TY  - BOOK
AU  - Gupta,D.C.
AU  - Langer,Paul H.
TI  - Emerging semiconductor technology 
T2  - STP 960
SN  - 0803104596
U1  - 621.38152 EME 
PY  - 1987///
CY  - Philadelphia, PA
PB  - American Society for Testing and Materials
KW  - Semiconductor industry
KW  - Semiconductors
N1  - Papers presented at the Fourth International Symposium on Semiconductor Processing; "ASTM publication code number (PCN) 04-960000-46."
ER  -